Nanoindentation-induced deformation behaviors of tetrahedral amorphous carbon film deposited by cathodic vacuum arc with different substrate bias voltages
Lijun Wang, Yan Liu, Hui Chen, Mengchao Wang
Topics & Concepts
Materials scienceNanoindentationComposite materialAmorphous carbonBiasingAmorphous solidDiamond-like carbonIndentationMicrostructureCarbon filmThin filmNanotechnologyVoltageCrystallographyPhysicsChemistryQuantum mechanicsDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsForce Microscopy Techniques and Applications