Litcius/Paper detail

Safer and effective alternatives to perfluoroalkyl-based surfactants in etching solutions for the semiconductor industry

Rashmi Sharma, Shreyas Shelke, Mohammad Bagheri Kashani, Gregory Morose, Christopher Christuk, Ramaswamy Nagarajan

2023Journal of Cleaner Production27 citationsDOI

Topics & Concepts

Pulmonary surfactantContact angleChemistryWettingAmmonium fluorideAqueous solutionChemical engineeringInorganic chemistryMaterials scienceOrganic chemistryEngineeringBiochemistryPer- and polyfluoroalkyl substances researchCarbon Dioxide Capture TechnologiesSurface Modification and Superhydrophobicity