A low-temperature thermal ALD process for nickel utilizing dichlorobis(triethylphosphine)nickel(<scp>ii</scp>) and 1,4-bis(trimethylgermyl)-1,4-dihydropyrazine
Anton Vihervaara, Timo Hatanpää, Kenichiro Mizohata, Mykhailo Chundak, Georgi Popov, Mikko Ritala
Abstract
DHP can open new avenues for the ALD of other metals at low temperatures.
Topics & Concepts
NickelThermalChemistryChemical engineeringProcess (computing)Materials scienceNuclear chemistryOrganic chemistryThermodynamicsPhysicsComputer scienceEngineeringOperating systemSemiconductor materials and devicesPhase-change materials and chalcogenidesMetallic Glasses and Amorphous Alloys