Atomic layer deposition to heterostructures for application in gas sensors
Hongyin Pan, Lihao Zhou, Wei Zheng, Xianghong Liu, Jun Zhang, Nicola Pinna
Abstract
Highlights Atomic layer deposition is versatile in precise design of heterostructure materials. Gas sensing performances of heterostructures engineered by ALD are reviewed. Future developments and challenges faced by ALD-designed materials are discussed.
Topics & Concepts
Atomic layer depositionHeterojunctionDeposition (geology)NanotechnologyLayer (electronics)Materials scienceOptoelectronicsGeologySedimentPaleontologyGas Sensing Nanomaterials and SensorsElectronic and Structural Properties of OxidesSemiconductor materials and devices