Fabrication of highly conducting ZnO/Ag/ZnO and AZO/Ag/AZO transparent conducting oxide layers using RF magnetron sputtering at room temperature
Bidyut Barman, Sanjay Kumar Swami, Viresh Dutta
Topics & Concepts
Materials scienceFabricationSputter depositionAnnealing (glass)SputteringOptoelectronicsSubstrate (aquarium)Electrical resistivity and conductivityLayer (electronics)Sheet resistanceTransparent conducting filmFigure of meritCavity magnetronThin filmComposite materialNanotechnologyAlternative medicineElectrical engineeringPathologyOceanographyMedicineEngineeringGeologyZnO doping and propertiesPerovskite Materials and ApplicationsElectronic and Structural Properties of Oxides