Influence of nitrogen flow ratio on properties of c-axis oriented AlN films grown by RF magnetron sputtering
Guifeng Chen, Haoran Li, Xinjian Xie, Luxiao Xie, Endong Wang, Guodong Liu, Hui Zhang, Bowen Lu, Changxing Li, Haobo Pei
Topics & Concepts
DiffractometerX-ray photoelectron spectroscopyMaterials scienceScanning electron microscopeAnalytical Chemistry (journal)SputteringSapphireSputter depositionNitrideTransmission electron microscopyCavity magnetronPhotoluminescenceArgonSurface roughnessThin filmLayer (electronics)OpticsOptoelectronicsChemistryComposite materialNanotechnologyNuclear magnetic resonanceLaserChromatographyPhysicsOrganic chemistryGaN-based semiconductor devices and materialsAcoustic Wave Resonator TechnologiesZnO doping and properties