Investigation of gallium oxide thin film hetero-integrated with bulk diamond via atomic layer deposition
Lin Gu, Hong-Ping Ma, Yuan Li, An-Feng Wang, Wen-Jie Chen, Zhuorui Tang, Yi Shen, Fang yuan Sun, Jingtao Zhu, Qing‐Chun Zhang
Topics & Concepts
DiamondMaterials scienceX-ray photoelectron spectroscopyMaterial properties of diamondRaman spectroscopyAnalytical Chemistry (journal)Thin filmCrystalliteHeterojunctionAtomic layer depositionOptoelectronicsNanotechnologyChemistryOpticsChemical engineeringMetallurgyPhysicsEngineeringChromatographyGa2O3 and related materialsZnO doping and propertiesSemiconductor materials and devices