Microstructure, oxidation behavior and tribological properties of AlCrN/Cu coatings deposited by a hybrid PVD technique
Dongsen Geng, Haiqing Li, Ziliang Chen, Yu X. Xu, Qimin Wang
Topics & Concepts
Materials scienceMicrostructureTribologyCoatingEvaporationMetallurgySputteringSputter depositionPhase (matter)Physical vapor depositionNitrideComposite materialThin filmLayer (electronics)NanotechnologyChemistryThermodynamicsOrganic chemistryPhysicsMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchBoron and Carbon Nanomaterials Research