Molecular dynamics simulation of nano-polishing of single crystal silicon on non-continuous surface
Guilian Wang, Zhijian Feng, Qingchun Zheng, Bin Li, Haibo Zhou
Topics & Concepts
PolishingMaterials scienceAbrasivePhase (matter)Deformation (meteorology)Chemical-mechanical planarizationComposite materialMolecular dynamicsChemistryComputational chemistryOrganic chemistryAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced machining processes and optimization