Litcius/Paper detail

Direct UV laser writing system to photolithographically fabricate optimal microfluidic geometries: Experimental investigations

Sangam Srikanth, Jaligam Murali Mohan, Sohan Dudala, Satish Kumar Dubey, Arshad Javed, Sanket Goel

2020Materials Today Proceedings12 citationsDOI

Topics & Concepts

PhotoresistPhotolithographyFabricationMaterials scienceSubstrate (aquarium)UltravioletLaserOptoelectronicsResistMicrofluidicsOpticsMicrofabricationNanotechnologyLayer (electronics)PathologyGeologyMedicineOceanographyPhysicsAlternative medicineLaser Material Processing TechniquesNanofabrication and Lithography TechniquesElectrowetting and Microfluidic Technologies