Improvement of metal-oxide films by post atmospheric Ar/O2 plasma treatment for thin film transistors with high mobility and excellent stability
Ravindra Naik Bukke, Narendra Naik Mude, Md Mobaidul Islam, Jin Jang
Topics & Concepts
X-ray photoelectron spectroscopyThin-film transistorMaterials scienceThreshold voltageOxideSaturation (graph theory)TransistorSubthreshold swingOptoelectronicsAnalytical Chemistry (journal)MetalPlasmaSubthreshold slopeChemical engineeringLayer (electronics)NanotechnologyVoltageMetallurgyElectrical engineeringChemistryMathematicsEngineeringQuantum mechanicsChromatographyCombinatoricsPhysicsThin-Film Transistor TechnologiesZnO doping and propertiesSemiconductor materials and devices