Advanced polishing methods for atomic-scale surfaces: A review
Zhun Luo, Zhenyu Zhang, Feng Zhao, Cheng Fan, Junyuan Feng, Hongxiu Zhou, Fanning Meng, Xuye Zhuang, Jianmei Wang
Topics & Concepts
PolishingAtomic unitsScale (ratio)Materials scienceComputer scienceMetallurgyPhysicsQuantum mechanicsAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchSemiconductor materials and devices