Realization of Wafer‐Scale 1T‐MoS<sub>2</sub> Film for Efficient Hydrogen Evolution Reaction
Hyeong‐U Kim, Mansu Kim, Hyunho Seok, Kyu‐Young Park, Ji‐Yun Moon, Jonghwan Park, Byeong‐Seon An, Hee Joon Jung, Vinayak P. Dravid, Dongmok Whang, Jae‐Hyun Lee, Taesung Kim
Abstract
Abstract The octahedral structure of 2D molybdenum disulfide (1T‐MoS 2 ) has attracted attention as a high‐efficiency and low‐cost electrocatalyst for hydrogen production. However, the large‐scale synthesis of 1T‐MoS 2 films has not been realized because of higher formation energy compared to that of the trigonal prismatic phase (2H)‐MoS 2 . In this study, a uniform wafer‐scale synthesis of the metastable 1T‐MoS 2 film is performed by sulfidation of the Mo metal layer using a plasma‐enhanced chemical vapor deposition (PE‐CVD) system. Thus, plasma‐containing highly reactive ions and radicals of the sulfurization precursor enable the synthesis of 1T‐MoS 2 at 150 °C. Electrochemical analysis of 1T‐MoS 2 shows enhanced catalytic activity for the hydrogen evolution reaction (HER) compared to that of previously reported MoS 2 electrocatalysts 1T‐MoS 2 does not transform into stable 2H‐MoS 2 even after 1000 cycles of HER. The proposed low‐temperature synthesis approach may offer a promising solution for the facile production of various metastable‐phase 2D materials.