Enhanced growth rates of N-type phosphorus-doped polycrystalline diamond via in-liquid microwave plasma CVD
Yusuke Tominaga, Akihiro Uchida, Y.M. Hunge, Isao Shitanda, Masayuki Itagaki, Takeshi Kondo, Makoto Yuasa, Hiroshi Uestuska, Chiaki Terashima
Topics & Concepts
Raman spectroscopyChemical vapor depositionDiamondAnalytical Chemistry (journal)Dielectric spectroscopyMaterials scienceCyclic voltammetrySpectroscopyMicrowaveElectrodeElectrochemistryOptoelectronicsChemistryOpticsOrganic chemistryPhysical chemistryComposite materialPhysicsQuantum mechanicsDiamond and Carbon-based Materials ResearchSemiconductor materials and devicesMetal and Thin Film Mechanics