Surface cleaning process for plasma-etched SiC wafer
Lihuan Zhao, Haiping Shang, Dahai Wang, Yang Liu, Miao Xue, Jiahan Yu, Weibing Wang
Topics & Concepts
WaferPlasmaMaterials scienceProcess (computing)Plasma etchingPlasma cleaningOptoelectronicsEtching (microfabrication)NanotechnologyComputer scienceLayer (electronics)PhysicsNuclear physicsOperating systemAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced ceramic materials synthesis