Hybrid-integrated chalcogenide photonics
Bin Zhang, Di Xia, Xin Zhao, Lei Wan, Zhaohui Li
Abstract
High-quality photonic materials are critical for promoting integrated photonic devices with broad bandwidths, high efficiencies, and flexibilities for high-volume chip-scale fabrication. Recently, we designed a home-developed chalcogenide glass (ChG)-Ge25Sb10S65 (GeSbS) for optical information processing chips and systems, which featured an ultrabroad transmission window, a high Kerr nonlinearity and photoelastic coefficient, and compatibility with the photonic hybrid integration technology of silicon photonics. Chip-integrated GeSbS microresonators and microresonator arrays with high quality factors and lithographically controlled fine structures were fabricated using a modified nanofabrication process. Moreover, considering the high Kerr nonlinearity and photoelastic effect of ChGs, we realised a novel ChG hybrid integrated chip, inspired by recent advances in integrated soliton microcombs and acousto-optic (AO) modulators.