A novel liquid film shearing polishing technique for silicon carbide and its processing damage mechanisms
Hongyu Chen, Hongbing Wan, Binbin Hong, Wei Hang, Te Zhu, Peng Zhang, Xingzhong Cao, Qiu Xu, Rong Wang, Xuefeng Han, Binghai Lyu
Topics & Concepts
PolishingShearing (physics)Silicon carbideMaterials scienceCarbideMetallurgyComposite materialSiliconForensic engineeringEngineeringAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationMetal and Thin Film Mechanics