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Morphological and structural properties of Cu2O/2-D photonic silicon nano structure for gas sensors

Makram A. Fakhri, Mariam M. Hassan

2020AIP conference proceedings20 citationsDOI

Abstract

This study consists of preparation and study of the physical, optical and electrical properties of 2D-Si and Cu2O/2D-Si thin films. The 2D-Si was introduced as a substrate by (PECE), the current density is changed (10 mA and 20 mA) and etching time is (10min). The copper oxide was deposited on the 2D-Si by PLD technique using pure copper. The physical, optical and electrical properties were studied of 2D-Si and Cu2O/2D-Si thin films to find the best thin films that could be used as gas sensor. The structure properties were studied by X-ray diffraction (XRD). All thin films were found to have multi-crystalline and cubic structures. The surface morphology is study by using atomic force microscope and field emission scanning electron microscope.

Topics & Concepts

Materials scienceThin filmSiliconScanning electron microscopeSubstrate (aquarium)Etching (microfabrication)Field emission microscopyOptoelectronicsCopperDiffractionField electron emissionNanotechnologyOpticsElectronComposite materialMetallurgyLayer (electronics)OceanographyGeologyQuantum mechanicsPhysicsZnO doping and propertiesCopper-based nanomaterials and applicationsGas Sensing Nanomaterials and Sensors
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