Ion energy dependence of dry etch damage depth in Ga2O3 Schottky rectifiers
Chao-Ching Chiang, Xinyi Xia, Jian-Sian Li, F. Ren, S. J. Pearton
Topics & Concepts
Etch pit densitySchottky diodeOptoelectronicsMaterials scienceDry etchingIonSchottky barrierAnalytical Chemistry (journal)Etching (microfabrication)ChemistryNanotechnologyDiodeChromatographyOrganic chemistryLayer (electronics)Ga2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques