Radially Pleated Disk Resonator for Gyroscopic Application
Xingjing Ren, Xin Zhou, Yi Tao, Qingsong Li, Xuezhong Wu, Dingbang Xiao
Abstract
In this paper, we propose a radially pleated disk resonator for gyroscopic application. The structure is made up of concentrically nested radially pleated rings that are interconnected by straight spokes, which has the potential to provide higher thermo-elastic quality factor and larger vibration amplitude. Decaying time constant of 31 s is experimentally obtained at resonant frequency of 3 kHz. A frequency-tuning model is proposed and verified, based on which, the frequency-tuning characters of the radially pleated disk resonator are thoroughly investigated. The Coriolis coupling factor <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\kappa $ </tex-math></inline-formula> of the radially pleated disk resonator is precisely measured by constructing a concise quadrature frequency-modulation operation, which gives the values of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\kappa $ </tex-math></inline-formula> = 0.7687 and agrees well with the calculated value of 0.7768. This work provides a new strategy for designing high performance MEMS gyroscope structure, and gives a good template for gyroscopic resonator characterization. [2021-0096]