Origination and evolution of point defects in AlN film annealed at high temperature
Cuihong Kai, Hang Zang, Jianwei Ben, Ke Jiang, Zhiming Shi, Yuping Jia, Xingzhong Cao, Wei Lü, Xiaojuan Sun, Dabing Li
Topics & Concepts
PhotoluminescenceAnnealing (glass)Crystallographic defectMaterials scienceImpurityUltravioletPositron annihilation spectroscopyDislocationOptoelectronicsSpectroscopyPositronAnalytical Chemistry (journal)Positron annihilationCrystallographyChemistryMetallurgyPhysicsComposite materialChromatographyQuantum mechanicsOrganic chemistryElectronGaN-based semiconductor devices and materialsGa2O3 and related materialsZnO doping and properties