Influence of Biaxial Strain and Interfacial Layer Growth on Ferroelectric Wake-Up and Phase Transition Fields in ZrO<sub>2</sub>
Bohan Xu, Richard Ganser, Kristina M. Holsgrove, Xuetao Wang, Pramoda Vishnumurthy, Thomas Mikolajick, Uwe Schroeder, Alfred Kersch, Patrick D. Lomenzo
Abstract
Investigations on fluorite-structured ferroelectric HfO 2 /ZrO 2 thin films are aiming to achieve high-performance films required for memory and computing technologies. These films exhibit excellent scalability and compatibility with the complementary metal-oxide semiconductor process used by semiconductor foundries, but stabilizing ferroelectric properties with a low operation voltage in the as-fabricated state of these films is a critical component for technology advancement. After removing the influence of interfacial layers, a linear correlation is observed between the biaxial strain and the electric field for transforming the nonferroelectric tetragonal to the ferroelectric orthorhombic phase in ZrO 2 thin films. This observation is supported by applying the principle of energy conservation in combination with ab initio and molecular dynamics simulations. According to the simulations, a rarely reported Pnm2 1 orthorhombic phase may be stabilized by tuning biaxial strain in the ZrO 2 films. This study demonstrates the significant influence of interfacial layers and biaxial strain on the phase transition fields and shows how strain engineering can be used to improve ferroelectric wake-up in ZrO 2 .