Exploring different approaches of multipulse HiPIMS
Jaroslav Hnilica, Pavel Souček, Martin Ondryáš, Peter Klein, Matej Fekete, Petr Vašina
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceNanotechnologySputteringThin filmSputter depositionMetal and Thin Film MechanicsAcoustic Wave Resonator TechnologiesDiamond and Carbon-based Materials Research