AlScN-based quasi-static multi-degree-of-freedom piezoelectric MEMS micromirror with large mirror plate and high fill factor
Junning Zhang, Yan Wang, Peng Chen, Tunan Lv, Hongbin Yu
Topics & Concepts
Microelectromechanical systemsPiezoelectricityOpticsMaterials scienceDegree (music)AcousticsOptoelectronicsPhysicsComposite materialAdvanced MEMS and NEMS TechnologiesAcoustic Wave Resonator TechnologiesMechanical and Optical Resonators