Modeling of plasma density, argon ion energy and ion velocity functions in a dipolar electron cyclotron resonance plasma source
Bin Zhang, Xiaobing Zhang
Topics & Concepts
IonAtomic physicsPlasmaElectron cyclotron resonanceDipoleElectronComputational physicsPhysicsNuclear physicsQuantum mechanicsPlasma Diagnostics and ApplicationsParticle accelerators and beam dynamicsMetal and Thin Film Mechanics