Highly sensitive MOEMS integrated photonic crystal cavity resonator for nano-mechanical sensing
Saurabh Agarwal, Jitendra K. Mishra, Vishnu Priye
Topics & Concepts
ResonatorMaterials scienceNano-Pressure sensorPhotonic crystalSensitivity (control systems)Displacement (psychology)OpticsOptoelectronicsPhotonicsWavelengthElectronic engineeringPhysicsComposite materialEngineeringThermodynamicsPsychotherapistPsychologyPhotonic and Optical DevicesMechanical and Optical ResonatorsAdvanced Fiber Optic Sensors