High fill factor microlens array fabrication using direct laser writing and its application in wavefront detection
Yi Huang, Yanliang Qin, Pu Tu, Qi Zhang, Ming Zhao, Zhenyu Yang
Abstract
We fabricate 100% fill factor microlens arrays (MLAs) using femtosecond laser direct writing. The array consists of periodical hexagonal plano-convex microlens units with a diameter of 9 µm. The focusing efficiency of each microlens is measured to be 92%. Combined with a CCD camera, the MLA works as a Shack-Hartmann wavefront sensor. We use it to detect wavefronts of both oblique incident plane beams and vortex beams. The experimental results match well with theoretical ones.
Topics & Concepts
MicrolensOpticsWavefrontFabricationLaserHolographyMaterials scienceLaser lightPhysicsLens (geology)Alternative medicineMedicinePathologyAdvanced optical system designNonlinear Optical Materials StudiesAdaptive optics and wavefront sensing