Investigation of the impact of optical glass composition on ceria slurry stability during chemical mechanical polishing process
Farouq Abbas, Nabil Belkhir, Andreas Herrmann, Edda Rädlein
Topics & Concepts
PolishingSlurryChemical-mechanical planarizationMaterials scienceProcess (computing)Chemical compositionComposition (language)MetallurgyComposite materialChemistryLinguisticsComputer scienceOrganic chemistryOperating systemPhilosophyAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationDiamond and Carbon-based Materials Research