Nanoporous ZnO structure prepared by HiPIMS sputtering for enhanced ozone gas detection
Yempati Nagarjuna, Yu‐Jen Hsiao, Sheng‐Chang Wang, Cheng-Ye Shao, Yu‐Chun Huang
Topics & Concepts
Materials scienceNanoporousHigh-power impulse magnetron sputteringSputteringOzoneChemical engineeringNanotechnologySputter depositionThin filmOrganic chemistryChemistryEngineeringGas Sensing Nanomaterials and SensorsZnO doping and propertiesGa2O3 and related materials