Ferroelectricity of pure HfOx in metal-ferroelectric-insulator-semiconductor stacks and its memory application
Kyung Kyu Min, Junsu Yu, Yeonwoo Kim, Chae Soo Kim, Taejin Jang, Sungmin Hwang, Hyungjin Kim, Jong‐Ho Lee, Daewoong Kwon, Byung‐Gook Park
Topics & Concepts
FerroelectricityMaterials scienceDopantDopingOptoelectronicsNon-volatile memoryDielectricFerroelectric and Negative Capacitance DevicesAdvanced Memory and Neural ComputingSemiconductor materials and devices