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Innovative synthesis of CeO2 nanoparticles for advanced chemical mechanical polishing

Gaoyuan Ren, Li Wang, Shudong Wang

2024Colloids and Surfaces A Physicochemical and Engineering Aspects24 citationsDOI

Topics & Concepts

PolishingNanoparticleChemical-mechanical planarizationMaterials scienceNanotechnologyChemical engineeringMetallurgyEngineeringAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced materials and composites
Innovative synthesis of CeO2 nanoparticles for advanced chemical mechanical polishing | Litcius