Innovative synthesis of CeO2 nanoparticles for advanced chemical mechanical polishing
Gaoyuan Ren, Li Wang, Shudong Wang
Topics & Concepts
PolishingNanoparticleChemical-mechanical planarizationMaterials scienceNanotechnologyChemical engineeringMetallurgyEngineeringAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced materials and composites