High efficiency fabrication of Si microlenses by applying in-situ laser and ultrasonic vibration hybrid diamond cutting
Jianguo Zhang, Xinhuan Li, Shanyi Ma, Yujiang Lu, Haoxia Tian, Junfeng Xiao, Jianfeng Xu
Topics & Concepts
Materials scienceFabricationUltrasonic sensorDiamondIn situLaserVibrationOpticsComposite materialOptoelectronicsAcousticsChemistryPhysicsPathologyMedicineOrganic chemistryAlternative medicineAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchLaser Material Processing Techniques