Effect of annealing temperature on the electrical characteristics of Al/Er2O3/n-Si/Al MOS capacitors
Alex Mutale, S.C. Deevi, Ercan Yılmaz
Topics & Concepts
Annealing (glass)Equivalent series resistanceMaterials scienceCapacitorCapacitanceAnalytical Chemistry (journal)Root mean squareDiffractometerAtmospheric temperature rangeSurface roughnessGrain sizeScanning electron microscopeOptoelectronicsComposite materialElectrical engineeringChemistryVoltageElectrodeChromatographyPhysical chemistryMeteorologyEngineeringPhysicsSemiconductor materials and devicesSemiconductor materials and interfacesSilicon Nanostructures and Photoluminescence