In situ absolute surface metrology for a 600 mm aperture interferometer
You Zhou, Shijie Liu, Qi Lü, Yunbo Bai, Fulin Wu, Jianda Shao
Topics & Concepts
InterferometryOpticsRepeatabilityRotation (mathematics)Interference (communication)Aperture (computer memory)MetrologyReflection (computer programming)Fizeau interferometerPhysicsAstronomical interferometerAcousticsComputer scienceGeometryMathematicsStatisticsChannel (broadcasting)Computer networkProgramming languageAdvanced Measurement and Metrology TechniquesOptical measurement and interference techniquesOptical Systems and Laser Technology