High-power electro-mechanical behavior of a capacitive microwave power sensor with warped cantilever beam
Jianhua Li, Xiaoping Liao
Topics & Concepts
CantileverCapacitive sensingMaterials scienceMicrowaveMicroelectromechanical systemsPower (physics)Beam (structure)Finite element methodOptoelectronicsAcousticsElectrical engineeringOpticsEngineeringPhysicsStructural engineeringComposite materialQuantum mechanicsTelecommunicationsAdvanced MEMS and NEMS TechnologiesAcoustic Wave Resonator TechnologiesMechanical and Optical Resonators