Synthesis of hexagonal boron nitride films on silicon and sapphire substrates by low-pressure chemical vapor deposition
Ranjan Singhal, Elena Echeverría, David N. McIlroy, R. N. Singh
Topics & Concepts
Materials scienceChemical vapor depositionSapphireX-ray photoelectron spectroscopySiliconThin filmRaman spectroscopyAnalytical Chemistry (journal)Scanning electron microscopeStoichiometryChemical engineeringNanotechnologyOptoelectronicsChemistryOpticsComposite materialPhysical chemistryLaserPhysicsChromatographyEngineeringGraphene research and applications2D Materials and ApplicationsBoron and Carbon Nanomaterials Research