Morphology evolution of Vickers indentation in fused silica glass etched by atmospheric pressure plasma jet
Peiqi Jiao, Qiang Xin, Bin Fan, Yongqian Wu, Xiang Wu
Topics & Concepts
Materials scienceIndentationAtmospheric-pressure plasmaJet (fluid)Composite materialMachiningEtching (microfabrication)IsotropyAnisotropyLayer (electronics)PlasmaIsotropic etchingOpticsMetallurgyMechanicsPhysicsQuantum mechanicsAdvanced Surface Polishing TechniquesLaser Material Processing TechniquesMetal and Thin Film Mechanics