Fabrication of BN thin films by chemical vapor deposition on 4H–SiC (0001) single-crystalline surfaces
Bomin Feng, Jun Chen, Yifei Yang, Mao Yang, Hongbing Wang, Changyin Zhong, Yawei Hao, Jinhua Yang, Jian Jiao, Yunxi Yao
Topics & Concepts
Thin filmMaterials scienceX-ray photoelectron spectroscopyCrystallinityChemical vapor depositionRaman spectroscopyCombustion chemical vapor depositionChemical engineeringCarbon filmFabricationNanotechnologyComposite materialOpticsAlternative medicinePhysicsMedicineEngineeringPathologyBoron and Carbon Nanomaterials ResearchAdvanced ceramic materials synthesisGraphene research and applications