A close atomic surface of stainless steel produced by novel green chemical mechanical polishing using silica and lanthana mixed abrasives
Yaowen Wu, Dong Wang, Zhenyu Zhang, Feng Zhao, Hongxiu Zhou, Xiuqing Liu, Xiaofei Yang
Abstract
ions. This innovatively green CMP process suggests a fresh perspective on achieving fine surface roughness on stainless steel, simultaneously enhancing its wear and corrosion assistance. Its potential application in high-performance stainless steel devices is promising.
Topics & Concepts
PolishingMaterials scienceMetallurgyChemical-mechanical planarizationComposite materialAdvanced Surface Polishing TechniquesAdvanced materials and compositesAdvanced Materials Characterization Techniques