Catalytic thermal decomposition of tetrafluoromethane (CF4): A review
Ali Anus, Mahshab Sheraz, Sangjae Jeong, Eui-Kun Kim, Seungdo Kim
Topics & Concepts
Thermal decompositionDecompositionCatalysisProcess (computing)ChemistryProcess engineeringComputer scienceOrganic chemistryEngineeringOperating systemInorganic Fluorides and Related CompoundsAtmospheric Ozone and ClimateAtmospheric chemistry and aerosols