Synergetic effect of H2O2 and PTA on the microscratch and indentation of GaN wafer with electricity
Huaijun Guan, Shiwei Niu, Yongguang Wang, Xiaolong Lu, Zhao Ding, Weiwei Liu, Dong Zhao
Topics & Concepts
NanoindentationMaterials scienceWaferIndentationPolishingTerephthalic acidCorrosionComposite materialMetallurgyPolyesterNanotechnologyMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchAdvanced Surface Polishing Techniques