Material dielectricity effects on the performance of capacitive micro-devices: a nonlinear study
Samira Valizadeh, Mohammad Fathalilou, Ghader Rezazadeh
Topics & Concepts
DielectricMaterials scienceCapacitive sensingNonlinear systemSolid mechanicsCapacitorCapacitanceVoltageComposite materialMicrostructureSofteningHigh voltageEngineering physicsMechanical engineeringMechanicsOptoelectronicsElectronic engineeringElectrical engineeringEngineeringPhysicsQuantum mechanicsElectrodeAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsAcoustic Wave Resonator Technologies