Enhanced robust nanopositioning control for an X-Y piezoelectric stage with sensor delays: An infinite dimensional <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline" id="d1e535" altimg="si95.svg"><mml:msup><mml:mrow><mml:mi mathvariant="script">H</mml:mi></mml:mrow><mml:mrow><mml:mi>∞</mml:mi></mml:mrow></mml:msup></mml:math> optimization approach
Zhiming Zhang, Peng Yan
Topics & Concepts
Control theory (sociology)Robustness (evolution)Finite impulse responsePID controllerDigital controlAlgorithmRobust controlCurse of dimensionalityDigital filterComputer scienceCapacitive sensingMathematicsFilter (signal processing)Control systemControl engineeringEngineeringElectronic engineeringArtificial intelligenceControl (management)Computer visionBiochemistryTemperature controlChemistryGeneOperating systemElectrical engineeringPiezoelectric Actuators and ControlAeroelasticity and Vibration ControlForce Microscopy Techniques and Applications