Photoelectrochemical etching of ultra-wide bandgap β-Ga2O3 semiconductor in phosphoric acid and its optoelectronic device application
Yong Choi, Kwang Hyeon Baik, Suhyun Kim, Jihyun Kim
Topics & Concepts
Etching (microfabrication)Materials sciencePhosphoric acidBand gapOptoelectronicsSemiconductorFabricationResponsivityIsotropic etchingNanotechnologyAnalytical Chemistry (journal)ChemistryLayer (electronics)MetallurgyChromatographyPhotodetectorMedicineAlternative medicinePathologyGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques