Sintering densification of ITO targets with low tin oxide content for depositing TCO films as electrodes of solar cells
Tan Wang, Jiwen Xu, Guisheng Zhu, Fei Shang, Huarui Xu
Topics & Concepts
SinteringMaterials scienceMicrostructureElectrical resistivity and conductivityIndium tin oxidePhase (matter)Sputter depositionMetallurgyChemical engineeringSputteringComposite materialNanotechnologyThin filmElectrical engineeringOrganic chemistryEngineeringChemistryZnO doping and propertiesSemiconductor materials and devicesGas Sensing Nanomaterials and Sensors