Surface etching evolution of mechanically polished single crystal diamond with subsurface cleavage in microwave hydrogen plasma: Topography, state and electrical properties
Yuting Zheng, Yanwei Jia, Jinlong Liu, Junjun Wei, Liangxian Chen, Kang An, Xiongbo Yan, Xiaotong Zhang, Haitao Ye, Xiaoping Ouyang, Chengming Li
Topics & Concepts
DiamondCleavage (geology)MicrowaveMaterials scienceEtching (microfabrication)Plasma etchingSingle crystalPlasmaHydrogenNanotechnologyChemistryCrystallographyComposite materialFracture (geology)Layer (electronics)Organic chemistryQuantum mechanicsPhysicsDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsAdvanced Surface Polishing Techniques