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Thickness dependent optical properties of amorphous/polycrystalline Ga2O3 thin films grown by plasma-enhanced atomic layer deposition

Weiming Liu, Junbo He, Xudan Zhu, Tiantian Huang, Xin Chen, Yu-Xiang Zheng, Liang‐Yao Chen, Rongjun Zhang

2022Thin Solid Films17 citationsDOI

Topics & Concepts

Materials scienceCrystalliteAmorphous solidBand gapThin filmAtomic layer depositionOptoelectronicsRefractive indexSapphireEllipsometryAnnealing (glass)OpticsAnalytical Chemistry (journal)NanotechnologyLaserChemistryCrystallographyComposite materialPhysicsMetallurgyChromatographyGa2O3 and related materialsZnO doping and propertiesMultiferroics and related materials
Thickness dependent optical properties of amorphous/polycrystalline Ga2O3 thin films grown by plasma-enhanced atomic layer deposition | Litcius