Deepening of nanograting structures on Si by a two-step laser spatial-selective amorphization strategy combined with chemical etching
Xiuyun Li, Ruiyan Li, Zhi Yu, Jun Xing, Wenchi Kong, Yue Wang, Jianjun Yang
Topics & Concepts
FemtosecondLaserMaterials scienceIsotropic etchingEtching (microfabrication)SiliconRaman spectroscopyOpticsAnisotropyOptoelectronicsRaman scatteringNanotechnologyLayer (electronics)PhysicsLaser Material Processing TechniquesPhotonic Crystals and ApplicationsNonlinear Optical Materials Studies