Organometallic and coordinative photoresist materials for EUV lithography and related photolytic mechanisms
Ga‐Young Lim, Kangsik Lee, Suin Choi, Hyo Jae Yoon
Topics & Concepts
Extreme ultraviolet lithographyPhotoresistNanolithographyLithographyChemistryNanotechnologyPhotolithographyResistExtreme ultravioletPhotochemistryOptoelectronicsMaterials scienceOpticsLaserFabricationPhysicsMedicineLayer (electronics)PathologyAlternative medicineAdvancements in Photolithography TechniquesIntegrated Circuits and Semiconductor Failure AnalysisElectron and X-Ray Spectroscopy Techniques