Ultra-sensitive UV sensors based on porous silicon carbide thin films on silicon substrate
Nima Naderi, M. Azhdari Moghaddam
Topics & Concepts
Materials sciencePorous siliconEtching (microfabrication)OptoelectronicsThin filmSubstrate (aquarium)PorosityCurrent densitySiliconSilicon carbidePhotoluminescenceNanotechnologyComposite materialLayer (electronics)OceanographyPhysicsQuantum mechanicsGeologyZnO doping and propertiesGa2O3 and related materialsSilicon Nanostructures and Photoluminescence